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AbstractAbstract
[en] A 300-nm-thick PbZr0.3Ti0.7O3 [PZT(30/70)] film was sputtered onto LaNiO3 (LNO)/Si(100) substrates at a substrate temperature of 200degC and then annealed under an oxygen pressure of 4 MPa at 400degC. The amorphous phase of the as-sputtered PZT(30/70) film was transformed to a highly (h00)-oriented perovskite phase by high-oxygen-pressure-processing (HOPP). The results of electrical measurements such as of polarization (P) as functions of applied electric field (E) (P-E hysteresis loops), the capacitance as functions of the applied dc electric field (C-E loops), and the dielectric constant (εr) and dissipation factor (tan δ) suggested that ferroelectric properties of PZT(30/70) films were largely improved by HOPP. We consider that HOPP is compatible with currently existing silicon-based technology, which is characterized by incorporating sputtering and a processing temperature limit of ∼450degC. The P-E hysteresis loops obtained from a prototype of 128x128 uncooled infrared detector arrays prepared by HOPP supported the good ferroelectricity with a high pyroelectric coefficient. (author)
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Source
Available from doi: http://dx.doi.org/10.1143/JJAP.47.7523; 22 refs., 5 figs.
Record Type
Journal Article
Journal
Japanese Journal of Applied Physics; ISSN 0021-4922;
; v. 47(9,2,pt.2); p. 7523-7526

Country of publication
AMORPHOUS STATE, ANNEALING, ATOMIC FORCE MICROSCOPY, CAPACITANCE, CRYSTALLIZATION, ELECTRIC FIELDS, FERROELECTRIC MATERIALS, FILMS, FREQUENCY DEPENDENCE, GASES, HYSTERESIS, OXYGEN, PERMITTIVITY, PEROVSKITE, POLARIZATION, PRESSURE RANGE MEGA PA 01-10, PYROELECTRIC EFFECT, PZT, SAMPLE PREPARATION, SPUTTERING, SUBSTRATES, TEMPERATURE RANGE 0400-1000 K, X-RAY DIFFRACTION
COHERENT SCATTERING, DIELECTRIC MATERIALS, DIELECTRIC PROPERTIES, DIFFRACTION, ELECTRICAL PROPERTIES, ELEMENTS, FLUIDS, HEAT TREATMENTS, LEAD COMPOUNDS, MATERIALS, MICROSCOPY, MINERALS, NONMETALS, OXIDE MINERALS, OXYGEN COMPOUNDS, PEROVSKITES, PHASE TRANSFORMATIONS, PHYSICAL PROPERTIES, PRESSURE RANGE, PRESSURE RANGE MEGA PA, SCATTERING, TEMPERATURE RANGE, TITANATES, TITANIUM COMPOUNDS, TRANSITION ELEMENT COMPOUNDS, ZIRCONATES, ZIRCONIUM COMPOUNDS
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