[en] First of all the physics processes generating the energy deposition in the sensor volume are investigated. The spatial resolution limits of photon interactions and the range of secondary electrons are discussed. The signatures in the energy deposition spectrum in pixelated detectors with direct conversion layers are described. The energy deposition for single events can be generated by the Monte-Carlo-Simulation package ROSI. The basic interactions of photons with matter are evaluated, resulting in the ability to use ROSI as a basis for the simulation of photon counting pixel detectors with direct conversion. In the context of this thesis a detector class is developed to simulate the response of hybrid photon counting pixel detectors using high-Z sensor materials like Cadmium Telluride (CdTe) or Gallium Arsenide (GaAs) in addition to silicon. To enable the realisation of such a simulation, the relevant physics processes and properties have to be implemented: processes in the sensor layer (provided by EGS4/LSCAT in ROSI), generation of charge carriers as electron hole pairs, diffusion and repulsion of charge carriers during drift and lifetime. Furthermore, several noise contributions of the electronics can be taken into account. The result is a detector class which allows the simulation of photon counting detectors. In this thesis the multiplicity framework is developed, including a formula to calculate or measure the zero frequency detective quantum efficiency (DQE). To enable the measurement of the multiplicity of detected events a cluster analysis program was developed. Random and systematic errors introduced by the cluster analysis are discussed. It is also shown that the cluster analysis method can be used to determine the averaged multiplicity with high accuracy. The method is applied to experimental data. As an example using the implemented detector class, the discriminator threshold dependency of the DQE and modulation transfer function is investigated in detail for Silicon and CdTe as sensor materials. For CdTe these results are shown beside the energy response spectrum for an ideal energy deposition detector, the ideal response of a Medipix2 detector and for the charge summing mode of the Medipix3 detector. (orig.)