[en] Beryllium, carbon and tungsten are planned to be used as first wall materials in the future fusion reactor ITER. The aim of this work is a characterization of mixed material formation induced by thermal load. To this end, model systems (layers) were prepared and investigated, which give insight into the basic physical and chemical concepts. Before investigating ternary systems, the first step was to analyze the binary systems Be/C and Be/W (bottom-up approach), where the differences between the substrates PG (pyrolytic graphite) and HOPG (highly oriented pyrolytic graphite) were of special interest. Particularly X-ray photoelectron spectroscopy (XPS), low energy ion scattering (ISS) and Rutherford backscattering spectroscopy (RBS) were used as analysis methods. Beryllium evaporated on carbon shows an island growth mode, whereas a closed layer can be assumed for layer thicknesses above 0.7 nm. Annealing of the Be/C system induces Be₂C island formation for T≥770 K. At high temperatures (T≥1170 K), beryllium carbide dissociates, resulting in (metallic) beryllium desorption. For HOPG, carbide formation starts at higher temperatures compared to PG. Activation energies for the diffusion processes were determined by analyzing the decreasing beryllium amount versus annealing time. Surface morphologies were characterized using angle-resolved XPS (ARXPS) and atomic force microscopy (AFM). Experiments were performed to study processes in the Be/W system in the temperature range from 570 to 1270 K. Be₂W formation starts at 670 K, a complete loss of Be₂W is observed at 1170 K due to dissociation (and subsequent beryllium desorption). Regarding ternary systems, particularly Be/C/W and C/Be/W were investigated, attaching importance to layer thickness (reservoir) variations. At room temperature, Be₂C, W₂C, WC and Be₂W formation at the respective interfaces was observed. Further Be₂C is forming with increasing annealing temperatures. Depending on the layer sequence, carbide formation is complete in the temperature range between 570 and 770 K. Be₂W alloy formation only takes place if further metallic beryllium is available after carbide formation. Be₂C and Be₂W dissociate at temperatures T>1170 K. Based on RBS analysis of C/Be/W systems of several 100 nm thickness, the concentration dependent diffusion coefficient for Be in W was determined. Only Be₁₂W formation was observed due to the large beryllium reservoir. Carbide formation (Be₂C) is not observed until the alloy formation is completed. Furthermore, the first successful depth-resolved XPS measurements were performed on ternary layer systems using synchrotron radiation. The reactions in the ternary system are restricted to compounds that are already known from binary system investigations. No further Be, C, W-containing species are detected. Beryllium carbide is dominant in the system as long as it does not dissociate. (orig.)