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[en] A phase composition of ∼10 nm thick Fe film placed on the silicon substrate with 200 nm thick SiOx layer after annealing in vacuum and in H2+CH4 was investigated using Conversion Electron Moessbauer spectroscopy (CEMS). CEMS spectra show that the original iron film was formed by Fe3+ phase. This phase is stable after the annealing in vacuum or in H2+CH4 below 500 degree sign C but formation of phases with Fe2+ and Fe0(γ-Fe and α-Fe) was observed after annealing at 500 degree sign C and higher temperatures. Formation of fayalite (Fe2SiO4) occurred during vacuum annealing at 700 degree sign C. SEM and CEMS study of the sample with grown multi-walled carbon nanotubes shows that the dominating part of iron atoms is present in Fe3C and Fe5C2 carbide phases. Besides their stoichiometric forms, the spectrum components which can be ascribed to the amorphous Fe5-xC2+x carbides, γ-Fe, and Fe3+ were observed.