[en] A new ion optics system was developed and experimentally tested, which allows for high-resolution multiple beam characterization of materials. This system enables: (1) efficient, quasi-simultaneous measurements of the mass spectra of laser post-ionized sputtered species and secondary ions as well as secondary electron imaging, that can be accompanied and assisted by (2) low energy ion milling and (3) in-situ optical imaging and laser desorption with submicron resolution. Altogether, this ion optics system provides a versatile, sensitive combination of an analytical mass spectrometer and ion, electron and optical microscopes, which can efficiently detect one out of four sample atoms consumed during the analysis.