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[en] The deposition of SiN-thin film onto Fe-substrate by using sputtering technique at the radio frequency of 13.56 MHz for the purpose of protection against corrosion has been done. By this method, the Si target put at the cathode as target are bombarded by the positive Argon-ions, so that the target particles are sputtered at all of direction and reaction with ion N was occurred before the particles reached the substrate to form the SiN thin film by the process of reactive sputtering. The Fe-substrate was put as anode at the ground-position without bias-voltage. The APNC-method was used for the characterization of the thin film deposited on the Fe layer. This measurement showed the peaks of energy 830, 533 ,and 1785 keV, which are Fe, N and Si, respectively. The speed of corrosion was measured with the potentiostat at the salt contained water medium. At the variation of the RF-power, it was found the optimal value of 175 W resulted the minimum corrosion. The Nitrogen pressure and the depositions time of 9.5 x 10-2 torr and 25 minutes, respectively, were also found for the minimal value of corrosion. The experiment results were therefore the decreasing of the speed of corrosion, i.e, from 2.38 to 0.59 mpy. (author)
Source
Sukarsono, R.; Ganang Suradjijo (National Nuclear Energy Agency, Yogyakarta (Indonesia)) (eds.); Centre for Research and Development of Advanced Technology, National Nuclear Energy Agency, Yogyakarta (Indonesia); 265 p; ISSN 0216-3128; 
; 2002; p. 166-171; Scientific Meeting and Presentation on Basic Research in Nuclear Science and Technology; Pertemuan dan Presentasi Ilmiah Penelitian Dasar Ilmu Pengetahuan dan Teknologi Nuklir; Yogyakarta (Indonesia); 27 Jun 2002; Also available from Center for Development of Nuclear Informatics, National Nuclear Energy Agency, Puspiptek Area, Fax. 62-21-7560923, PO BOX 4274, Jakarta (ID); 7 refs.; 5 figs.
; 2002; p. 166-171; Scientific Meeting and Presentation on Basic Research in Nuclear Science and Technology; Pertemuan dan Presentasi Ilmiah Penelitian Dasar Ilmu Pengetahuan dan Teknologi Nuklir; Yogyakarta (Indonesia); 27 Jun 2002; Also available from Center for Development of Nuclear Informatics, National Nuclear Energy Agency, Puspiptek Area, Fax. 62-21-7560923, PO BOX 4274, Jakarta (ID); 7 refs.; 5 figs.