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AbstractAbstract
[en] Diamond-like carbon (DLC) thin film is one of the most widely used optical thin films. The fraction of chemical bondings has a great influence on the properties of the DLC film. In this work, DLC thin films are prepared by ion-beam sputtering deposition in Ar and CH_4 mixtures with graphite as the target. The influences of the ion-beam voltage on the surface morphology, chemical structure, mechanical and infrared optical properties of the DLC films are investigated by atomic force microscopy (AFM), Raman spectroscopy, nanoindentation, and Fourier transform infrared (FTIR) spectroscopy, respectively. The results show that the surface of the film is uniform and smooth. The film contains sp"2 and sp"3 hybridized carbon bondings. The film prepared by lower ion beam voltage has a higher sp"3 bonding content. It is found that the hardness of DLC films increases with reducing ion-beam voltage, which can be attributed to an increase in the fraction of sp"3 carbon bondings in the DLC film. The optical constants can be obtained by the whole infrared optical spectrum fitting with the transmittance spectrum. The refractive index increases with the decrease of the ion-beam voltage, while the extinction coefficient decreases. (paper)
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Source
Available from http://dx.doi.org/10.1088/1674-1056/24/6/067803; Country of input: International Atomic Energy Agency (IAEA)
Record Type
Journal Article
Journal
Chinese Physics. B; ISSN 1674-1056;
; v. 24(6); [5 p.]

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