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Gharesi, Mohsen; Ansari, Mohammad, E-mail: mohsengharesi@ee.kntu.ac.ir, E-mail: mohammad.ansari1371@gmail.com2016
AbstractAbstract
[en] Tin oxide is the main material utilized for the fabrication of chemical sensing pellets which operate at elevated temperatures. The heating is commonly carried out with ruthenium dioxide resistors. Here, a tin oxide-based microheater is developed for microsensor applications. These microheaters are fabricated on 0.5 mm thick alumina substrates using spray pyrolysis technique. The optimum SnO_2 heaters have a sheet resistivity in the 40-70 Ω/a range. Ohmic Ag/SnO_2 contacts are formed by silver paste printing followed by an appropriate thermal annealing, which provide connections to the external circuitry. Durability tests are carried out on several samples; the long-term performance of the fabricated devices is satisfactory. The method allows the elimination of the expensive ruthenium dioxide from the structure of generic gas sensors. (paper)
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IC-MAST2015: 5. international conference on materials and applications for sensors and transducers; Mykonos (Greece); 27-30 Sep 2015; Available from http://dx.doi.org/10.1088/1757-899X/108/1/012018; Country of input: International Atomic Energy Agency (IAEA)
Record Type
Journal Article
Literature Type
Conference
Journal
IOP Conference Series. Materials Science and Engineering (Online); ISSN 1757-899X;
; v. 108(1); [7 p.]

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