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[en] ZnO:Ga:N films were deposited on glass substrates by RF diode sputtering at substrate temperatures varying from room temperature to 300 deg C. The experimental results revealed 68 multiple effects of temperature on the film growth and its physical parameters. The deposition rate decreased from 16 to 0.8 nm/min with increasing TS. XRD patterns reveal a strong expressed c-axis preferred orientation of the crystallites. The relationship structure - electrical - optical properties was found. The integrated intensity of the (002) diffraction line increased with the increasing growth temperature and the resistivity of this film (0.5 Ωcm) was reduced more than an order of magnitude. The highest carrier concentration of 1.8x10"1"9 cm"-"3 was measured in the film with the highest average transmittance of 86 %. Shift of the optical band edge toward lower wavelengths corresponds to rise in the carrier concentration. (authors)
Source
Pudis, D. (ed.) (Dept. of Physics, Univ. of Zilina, Zilina (Slovakia)); Kubicova, I. (ed.) (Dept. of Physics, Univ. of Zilina, Zilina (Slovakia)); Bury, P. (ed.) (Dept. of Physics, Univ. of Zilina, Zilina (Slovakia)); Dept. of Physics, Faculty of Electrical Engineering, University Of Zilina, Zilina (Slovakia); Institute of Nuclear and Physical Engineering, Institute of Electronics and Photonics, Faculty of Electrical Engineering and Information Technology, Slovak Univ. of Technology, Bratislava (Slovakia); Slovak Physical Society, Bratislava (Slovakia); 328 p; ISBN 978-80-554-0386-1; 
; 15 Jun 2011; p. 65-68; APCOM 2011: 17. International Conference on Applied Physics of Condensed Matter; High Tatras (Slovakia); 22-24 Jun 2011; PROJECTS CENTEM-CZ.1.05/2.1.00/03.0088; 1M06031; VEGA-01/0220/09; VEGA-1/0689/09; Also available from http://kf.elf.stuba.sk/∼apcom/apcom11/proceedings/; 4 figs., 7 refs.
; 15 Jun 2011; p. 65-68; APCOM 2011: 17. International Conference on Applied Physics of Condensed Matter; High Tatras (Slovakia); 22-24 Jun 2011; PROJECTS CENTEM-CZ.1.05/2.1.00/03.0088; 1M06031; VEGA-01/0220/09; VEGA-1/0689/09; Also available from http://kf.elf.stuba.sk/∼apcom/apcom11/proceedings/; 4 figs., 7 refs.