[en] We report on the development of a combined Triode Sputter Ion pump and NEG pump for extreme high vacuum. The triode sputter ion pump incorporates a new type electrode consisting of a solid honeycomb anode, Titanium micro-cell pumping elements that has been developed after several rigorous ion trajectory simulations in combined electric and magnetic fields and enhanced Ceramic spacers. Pumping speed data measured for the micro cell electrode shows a 30% increase in pumping speed as compared with a conventional electrode. Further, the micro-cell electrode also shows better pumping speed at higher pressures as well as for inert gases. In addition, a novel NEG pump made from several individual pill-getters containing special stoichiometric ratios of Ti-V-Zr-Fe that has high pumping speeds specifically for Hydrogen, water vapor and CO_2 is also incorporated in the pump. The individual pill-getters are activated around 250°C. It is demonstrated that the TSIP together with the NEG Pump reaches an ultimate pressure of < 5 x 10"-"1"1 mbar in a clean vacuum system within 72 hours as measured by a calibrated Extractor Gauge. In this paper we report on the construction of the high efficiency electrodes, the ion trajectories, pump down curves, the ultimate pressure achieved and partial pressure measurements are present. (author)