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[en] The paper reports the research trends in developing probe-forming systems with high demagnification and analysis factors that limit a nuclear microprobe resolution. Parasitic aberrations caused by tilts and offsets of magnetic quadrupoles are studied in terms of their effect on probe parameters on a target. The most common arrangements of probe-forming systems such as a triplet and “Russian quadruplet” with separated geometry are considered. The accuracy prerequisites for the positioning of the quadrupoles are defined, and practical guidelines for alignment of probe-forming systems with high demagnification factors are suggested.