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Jiang, C.; Nicolaï, J.; Declémy, A.; Gilabert, E.; Beaufort, M.-F.; Barbot, J.-F., E-mail: julien.nicolai@univ-poitiers.fr2016
AbstractAbstract
[en] Single crystals of SiC were implanted with heavy inert gases (Xe, Ar) at elevated temperatures (300–800 °C) and for a large range of fluence (1 × 10"1"2–1 × 10"1"5 ions cm"−"2). Thermodesorption measurements suggest that gas is trapped by implantation-induced vacancy-type defects impeding any gas diffusion. The damage accumulation versus dose was studied through the tensile elastic strain determined by using X-ray diffraction. Results show that at low dose the strain is predictable via a thermally activated direct impact model. The low thermal activation energy at saturation suggests a dynamic recovery process dominated by the migration of interstitial-type defects as its relaxation during post thermal annealing. As compared with light-gas implantation the heavy-gas to defect ratio is low enhancing the formation of strongly perturbed zones rather than the formation of bubble precursors.
Primary Subject
Source
E-MRS 2015 spring meeting symposium G: Basic research on ionic-covalent materials for nuclear applications; Nice (France); 11-15 May 2015; S0168-583X(16)00028-8; Available from http://dx.doi.org/10.1016/j.nimb.2016.01.002; Copyright (c) 2016 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.; Country of input: International Atomic Energy Agency (IAEA)
Record Type
Journal Article
Literature Type
Conference
Journal
Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms; ISSN 0168-583X;
; CODEN NIMBEU; v. 374; p. 71-75

Country of publication
CARBIDES, CARBON COMPOUNDS, CHARGED PARTICLES, COHERENT SCATTERING, CRYSTAL DEFECTS, CRYSTAL STRUCTURE, CRYSTALS, DIFFRACTION, ELECTROMAGNETIC RADIATION, ELEMENTS, ENERGY, EVALUATION, FLUIDS, GASES, HEAT TREATMENTS, HYDROGEN ISOTOPES, IONIZING RADIATIONS, ISOTOPES, LIGHT NUCLEI, MECHANICAL PROPERTIES, NONMETALS, NUCLEI, ODD-ODD NUCLEI, POINT DEFECTS, RADIATIONS, RARE GASES, SCATTERING, SILICON COMPOUNDS, TEMPERATURE RANGE
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