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[en] The software ModePEB for modelling of electron beam processing in multilayer flat objects was shown to be a very useful tool for optimization of the irradiation of silicon based structures. Except its significant help in setting-up the accelerator parameters corresponding to a desired dose, its proven reliability and consistency with the measured data makes the ModePEB an inevitable instrument for design and optimization of electron irradiation experiments. (authors)
Source
Vajda, J. (ed.) (Institute of Nuclear and Physical Engineering, Institute of Electronics and Photonics, Faculty of Electrical Engineering and Information Technology, Slovak Univ. of Technology, Bratislava (Slovakia)); Jamnicky, I. (ed.) (Dept. of Physics,, Faculty of Electrical Engineering, University of Zilina, Zilina (Slovakia)); Institute of Nuclear and Physical Engineering, Institute of Electronics and Photonics, Faculty of Electrical Engineering and Information Technology, Slovak Univ. of Technology, Bratislava (Slovakia); Alumni Club of the Faculty of Electrical Engineering and Information Technology, Slovak University of Technology, Bratislava (Slovakia); Dept. of Physicsand Institute of Aurel Stodola, Faculty of Electrical Engineering, University of Zilina, Zilina (Slovakia); Slovak Physical Society, Bratislava (Slovakia); Institute of Physics, Slovak Academy of Sciences, Bratislava (Slovakia); Slovak Physical Society, Bratislava (Slovakia); Institut Francais-Slovaque, Bratislava (Slovakia). Funding organisation: Sponsors: Slovenske Elektrarne, a. s., Bratislava (Slovakia); Slovak Nuclear Society, Trnava (Slovakia); Institut Francais Slovaquie, Bratislava (Slovakia); 302 p; ISBN 978-80-227-3956-6; 
; 5 Jun 2013; p. 182-185; APCOM 2013: 19. International Conference on Applied Physics of Condensed Matter; Strbske Pleso (Slovakia); 19-21 Jun 2013; GRANT APVV-0321-11; VEGA-2/0062/13; Also available from http://kf.elf.stuba.sk/∼apcom/apcom13/proceedings/; 1 tab., 4 figs., 2 refs.
; 5 Jun 2013; p. 182-185; APCOM 2013: 19. International Conference on Applied Physics of Condensed Matter; Strbske Pleso (Slovakia); 19-21 Jun 2013; GRANT APVV-0321-11; VEGA-2/0062/13; Also available from http://kf.elf.stuba.sk/∼apcom/apcom13/proceedings/; 1 tab., 4 figs., 2 refs.