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Shemukhin, A.A.; Chernysh, V.S.; Balakshin, Yu.V.
Summaries of reports of XLIII International Tulinov conference on physics of interactions of charged particles with crystals2013
Summaries of reports of XLIII International Tulinov conference on physics of interactions of charged particles with crystals2013
AbstractAbstract
No abstract available
Original Title
Mekhanizmy uluchsheniya kachestva kristallichnosti sloev kremniya
Secondary Subject
Source
Panasyuk, M.I. (ed.); Moskovskij Gosudarstvennyj Univ. im. M.V. Lomonosova, Nauchno-Issledovatel'skij Inst. Yadernoj Fiziki im. D.V. Skobel'tsyna, Moscow (Russian Federation); 182 p; 2013; p. 137; 43. International Tulinov conference on physics of interactions of charged particles with crystals; XLIII mezhdunarodnaya Tulinovskaya konferentsiya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami; Moscow (Russian Federation); 28-30 May 2013; 1 ref.
Record Type
Miscellaneous
Literature Type
Conference; Numerical Data
Report Number
Country of publication
CRYSTAL STRUCTURE, EPITAXY, EXPERIMENTAL DATA, ION IMPLANTATION, KEV RANGE 100-1000, RADIATION DOSES, RECRYSTALLIZATION, RUTHERFORD BACKSCATTERING SPECTROSCOPY, SAPPHIRE, SILICON, SUBSTRATES, TEMPERATURE DEPENDENCE, TEMPERATURE RANGE 0013-0065 K, TEMPERATURE RANGE 0065-0273 K, TEMPERATURE RANGE 0273-0400 K, TRANSMISSION ELECTRON MICROSCOPY
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