[en] Taking advantage of low pressure plasma chemical vapor deposition technology, the hydrocarbon glow discharge polymer (GDP) and deuterated glow discharge polymer (D-GDP) films were fabricated by glow discharge polymerization technology. The deposition rates, the chemical structures and mechanical properties of films were studied by FTIR spectra, surface profiler and nano-indentation. The results show that the deposition rate of GDP/D-GDP almost linearly increases with the increase of gas flow, the deposition rate of GDP films is higher than that of D-GDP films. The cross-link degree of D-GDP films is lower than that in GDP films. The D-GDP films might be more favorable for IR heating on the DT ice of ICF target. The mechanical property of GDP is better than that of D-GDP. (authors)