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AbstractAbstract
[en] Full text: Ion microscopy is an exciting and emerging technology with a vast range of applications from materials characterization to nanostructuring. The talk will start off with an introduction to FIB/SEMs, which combine a gallium Focused Ion Beam (FIB) and a Scanning Electron Microscope (SEM). FIB/SEMs are a versatile tool for materials analysis and nanostructuring and are most commonly used to reveal internal sample structures at high resolution (cross-sectioning), to reconstruct a 3D model of the sample via a slice and view process and to prepare TEM-lamellas (sections) or samples for Atom Probe Tomography at precisely selected points within the sample which cannot be achieved by other techniques. In addition, FIB/SEMs are commonly used to fabricate nanoporous arrays or plasmonic devices. The first part of the talk will conclude with a discussion about the ion solid interactions and the most commonly found process induced artefacts and ways to avoid them. The presentation will then focus on introducing the more recent Helium/Neon Ion Microscopy (HIM) which excels at high resolution surface imaging of conductive and non-conductive samples while outperforming the Focused Ion Beam (FIB) at sub 10nm structuring. (author)
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MacLeod, Jennifer; Bell, John; Lipton-Duffin, Josh; Motta, Nunzio; Yambem, Soniya (School of Chemistry and Physics, Queensland University of Technology, Brisbane, QLD (Australia)); Rybachk, Maksym (School of Engineering and Built Environment, Griffith University, Southport, QLD (Australia)); The Australian Institute of Physics, North Melbourne, VIC (Australia); New Zealand Institute of Physics (New Zealand); 94 p; Jan 2018; p. 46; 42. Annual condensed matter and materials meeting; Wagga Wagga, NSW (Australia); 30 Jan - 2 Feb 2018; Available online from: http://aip.org.au/annual-cmm-meetings/; Also available online from: https://aip.org.au/wp-content/uploads/cmm/2018/Wagga_2018_Conference_Handbook.pdf; Abstract only, full text entered in this record, 4 refs.
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