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Nguyen, Manh The; Kang, Pilseong; Ghim, Young-Sik; Rhee, Hyug-Gyo, E-mail: young.ghim@kriss.re.kr, E-mail: hrhee@kriss.re.kr2018
AbstractAbstract
[en] Owing to the nonlinearity response of digital devices such as screens and cameras in phase-shifting deflectometry, non-sinusoidal phase-shifted fringe patterns are generated and additional measurement errors are introduced. In this paper, a new deflectometry technique is described for overcoming these problems using a pre-distorted pattern combined with an advanced iterative algorithm. The experiment results show that this method can reconstruct the 3D surface map of a sample without fringe print-through caused by the nonlinearity response of digital devices. The proposed technique is verified by measuring the surface height variations in a deformable mirror and comparing them with the measurement result obtained using a coordinate measuring machine. The difference between the two measurement results is estimated to be less than 13 µm. (paper)
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Available from http://dx.doi.org/10.1088/1361-6501/aaa3ad; Country of input: International Atomic Energy Agency (IAEA)
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