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Defavari, Rafael; Bagnato, Osmar Roberto; Francisco, Fernanda Regina; Manoel, Felipe Eduardo, E-mail: rafael.defavari@lnls.br
Sociedade Brasileira de Pesquisa em Materiais (SBPMat), Rio de Janeiro, RJ (Brazil); Universidade Federal da Paraíba (UFPB), João Pessoa, PB (Brazil)2014
Sociedade Brasileira de Pesquisa em Materiais (SBPMat), Rio de Janeiro, RJ (Brazil); Universidade Federal da Paraíba (UFPB), João Pessoa, PB (Brazil)2014
AbstractAbstract
[en] Full text: Titanium oxide thin films were deposited on Alumina 96% oblong ceramic tubes using magnetron sputtering process. These tubes will be part of the new synchrotron accelerator Sirius, having an important role liberating static charges during electron beam travel. Argon plasma was used during the deposition, and synthetic air flow was injected at the end of the process in order to oxide and stabilize the film resistance. Aiming the improvement of the process, several sputtering conditions were tested. The thin film resistance values obtained are in accordance with the project specifications. At the end, microstructural characterizations were made using Scanning Electron Microscopy - SEM and X-ray Photoelectron Spectroscopy - XPS. Thickness measurements of the deposited film were also made on several points along the length and width of the tube. (author)
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Source
2014; 1 p; 13. Brazilian SBPMat meeting; Joao Pessoa, PB (Brazil); 28 Sep - 2 Oct 2014; Available in abstract form only; full text entered in this record
Record Type
Miscellaneous
Literature Type
Conference
Country of publication
ALUMINIUM COMPOUNDS, CHALCOGENIDES, DIMENSIONS, ELECTRON MICROSCOPY, ELECTRON SPECTROSCOPY, ELECTRON TUBES, ELECTRONIC EQUIPMENT, ELEMENTS, EQUIPMENT, FILMS, FLUIDS, GASES, MICROSCOPY, MICROWAVE EQUIPMENT, MICROWAVE TUBES, NONMETALS, OXIDES, OXYGEN COMPOUNDS, PHOTOELECTRON SPECTROSCOPY, RARE GASES, SPECTROSCOPY, TITANIUM COMPOUNDS, TRANSITION ELEMENT COMPOUNDS
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