[en] Highlights: • Ti-Zr-Hf-Cu-Ni high-entropy metallic glass thin films (HEMG-TFs) were deposited. • The HEMG-TF has the largest strain rate sensitivity of hardness in metallic glasses. • This suggests the HEMG-TF has a more homogeneously disordered amorphous structure. Quinary Ti-Zr-Hf-Cu-Ni high-entropy metallic glass thin films were produced by magnetron sputter deposition. Nanoindentation tests indicate that the deposited film exhibits a relatively large hardness of 10.4±0.6 GPa and a high elastic modulus of 131±11 GPa under the strain rate of 0.5 s⁻¹. Specifically, the strain rate sensitivity of hardness measured for the thin film is 0.05, the highest value reported for metallic glasses so far. Such high strain rate sensitivity of hardness is likely due to the high-entropy effect which stabilizes the amorphous structure with enhanced homogeneity.