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Peng, Yuncheng; Zhu, Wei; Shen, Shengfei; Feng, Lishuang; Deng, Yuan, E-mail: zhu_wei@buaa.edu.cn, E-mail: dengyuan@buaa.edu.cn2017
AbstractAbstract
[en] Highlights: • A facile one-step sputtering process is developed to construct sandwich-porous copper films. • The ratio of surface-energy to substrate-temperature determines the formation of the porous structure. • High conductivity and super-elastic property are achieved due to the introduction of nano pores in the copper films. • The crack-growth is effectively hindered resulting from high elastic recovery work of sandwich-porous copper films. Porous metal film has drawn plenty of attention due to the excellent reliability and potential of integration in current interconnects/electrodes technologies. However, the practical applications of porous metal film have been hampered by complex technique and poor electrical properties. Here, we report a one-step method to directly construct a unique sandwich-porous copper film combining with high mechanical and electrical performance by a simple sputtering process. Growth parameters, with emphases on substrate temperature and deposition time, are systematically investigated to provide direct experimental validation of the formation mechanism of the sandwich-porous films. Results demonstrate that by tuning a porous-factor (β) during the film deposition, it is possible to noticeably affect the surface topography, from columnar to porous and/or dense structure, and hence effectively control the formation of the sandwich-porous structure. Additionally, nanoindentation tests for the sandwich-porous films are also investigated, where high conductivity and super-elastic property are achieved due to the special microstructures with presence of nanoporous. This discovery may pave a facile and effective way to fabricate multifunctional porous metallic films for bottom-up fabrication schemes of next-generation devices in the microelectronics industry.
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Source
S026412751730864X; Available from http://dx.doi.org/10.1016/j.matdes.2017.09.022; Copyright (c) 2017 Elsevier Ltd. All rights reserved.; Country of input: International Atomic Energy Agency (IAEA)
Record Type
Journal Article
Journal
Materials and Design; ISSN 0264-1275;
; v. 135; p. 151-158

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