[en] In this paper, we report on the investigation of temperature induced degradation mode of quantum cascade lasers (QCLs) with an emphasis on the influence of different processing technology. We investigate and compare lattice matched AlInAs/InGaAs/InP QCLs of various constructions, i.e., double trench, buried heterostructure and ridge waveguide regarding thermal management, reliability and sources of degradation. The analysis was performed by CCD thermoreflectance spectroscopy, scanning electron microscope inspection and destructive analysis by focused ion beam etching, enabling determination of the source and mode of degradation for investigated lasers. Experimental temperature data relate temperature rise, arising from supply current, with device geometry. Results clearly indicate, that the buried heterostructure geometry, allows reaching the highest maximal operating current densities, before the degradation occurs. Microscopic images of degradation confirm that degradation includes the damage of the contact layer as well as damage of the active region layers. (paper)