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AbstractAbstract
[en] Ion erosion etching is generally used to prepare surfaces for electron spectroscopy (ESCA and AES). During etching, selective interactions occur between ions and various elements from which the solid is constituted. The surface studied therefore undergoes modifications. Modifications of this type in the surface of a gold-copper alloy have been studied. The characteristics of an ion beam generated by a commercial gun without sweeping have been determined for low energy ions (beam shape, ion density distribution). These characteristics are then related to the effects observed (crater shape, etching rate). Neutron activation analysis has been used to determine the quantity of sputtered matter and subsequently the sputtering rate. Finally, a sequential analysis of sputtered matter (activation analysis) and studies of the characteristics of the eroded surface have confirmed the existence of a transient regime and enabled a correlation to be established between the composition of the surface layer for a stationary regime and the model used to describe the sputtering.
[fr]
Les analyses de surface effectuees par spectrometries electroniques (ESCA et Auger) necessitent un decapage prealable obtenu generalement par erosion ionique. L'interaction selective, lors de ce decapage, des ions avec les divers elements constituant le solide entraine une modification de la surface etudiee. L'etude d'une telle modification a ete menee sur un alliage binaire or-cuivre. Dans un premier temps, les caracteristiques du faisceau ionique, produit par un canon commercial sans balayage, ont ete determinees dans le cas d'ions de basse energie (forme du faisceau, repartition de la densite ionique). Elles ont ete reliees aux effets obtenus sur le solide (forme du cratere, vitesse d'erosion). D'autre part, les quantites de matiere pulverisee ont ete determinees par analyse par activation neutronique ce qui a permis d'acceder aux taux de pulverisation. Enfin, des analyses sequentielles de la matiere pulverisee (analyse par activation) et de la surface ayant subi l'erosion (analyse ESCA) ont confirme l'existence d'un regime transitoire et ont permis d'etablir une correlation entre la composition de la couche superficielle en regime stationnaire et le modele adopte pour le processus de pulverisation cathodique.Original Title
Etude par spectrometrie de photoelectrons et par activation neutronique des modifications en surface d'alliages induites par bombardement ionique: application a l'etude d'un alliage or-cuivre
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17 Jan 1986; 154 p; Available from the INIS Liaison Officer for France, see the INIS website for current contact and E-mail addresses; This record replaces 17087055; These (D. Univ.)
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