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[en] Mechanical and tribological characteristics of titanium-aluminum nitride films deposited by reactive magnetron sputtering of a TiAl mosaic target in an Ar/N2 gas mixture were studied. The dependences of the elemental composition, microhardness, friction coefficient and volume wear on the nitrogen concentration in the gas mixture during the deposition process are obtained. When the nitrogen content in the Ar/N2 gas mixture was 7.4 %, coatings with a hardness of 1250 HK, a friction coefficient of 0.12 - 0.13 and a volume wear of less than 6.3×10-11 mm3 at a load of 500 mN were obtained. An analysis of the results showed that coatings with a nitrogen deficiency in films of composition Ti5Al0.6N have the greatest microhardness and wear resistance. (authors)
Source
Uglov, V.V. (ed.) (Belarusian state univ., Minsk (Belarus)); Belarusian state univ., Minsk (Belarus); Ministry of education of Republic of Belarus, Minsk (Belarus); National academy of sciences of Belarus, Minsk (Belarus); Belarus state found of fundamental researches, Minsk (Belarus); 567 p; ISSN 2663-9939; 
; Sep 2019; p. 235-238; 13. International conference 'Interaction of radiation with solids'; 13. Mezhdunarodnaya konferentsiya 'Vzaimodejstvie izluchenij s tverdym telom'; Minsk (Belarus); 30 Sep - 3 Oct 2019; 7 refs., 7 figs.
; Sep 2019; p. 235-238; 13. International conference 'Interaction of radiation with solids'; 13. Mezhdunarodnaya konferentsiya 'Vzaimodejstvie izluchenij s tverdym telom'; Minsk (Belarus); 30 Sep - 3 Oct 2019; 7 refs., 7 figs.