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Zheng Qi-Wen; Cui Jiang-Wei; Wei Ying; Yu Xue-Feng; Lu Wu; Ren Diyuan; Guo Qi, E-mail: cuijw@ms.xjb.ac.cn2018
AbstractAbstract
[en] The bias dependence of radiation-induced narrow-width channel effects (RINCEs) in 65-nm n-type metal-oxidesemiconductor field-effect transistors (NMOSFETs) is investigated. The threshold voltage of the narrow-width 65nm NMOSFET is negatively shifted by total ionizing dose irradiation, due to the RINCE. The experimental results show that the 65nm narrow-channel NMOSFET has a larger threshold shift when the gate terminal is kept in the ground, which is contrary to the conclusion obtained in the old generation devices. Depending on the three-dimensional simulation, we conclude that electric field distribution alteration caused by shallow trench isolation scaling is responsible for the anomalous RINCE bias dependence in 65nm technology. (paper)
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Available from http://dx.doi.org/10.1088/0256-307X/35/4/046102; Country of input: International Atomic Energy Agency (IAEA)
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Journal Article
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