[en] Zinc oxide nanowires (ZnO-NWs) were deposited on a Si substrate by reacting ZnO powder with O₂ gas inside an APCVD reactor. The morphological, structural, chemical networks of ZnO-NWs were characterized by FTIR, Raman, XPS, FESEM, and XRD techniques. The FESEM result shows that the length and diameter of ZnO-NWs increases from 5-10 μm and 50-120 nm with increasing the oxygen flow rates from 40-120 sccm respectively. XRD 113 analysis confirms that ZnO crystal has a perfect hexagonal wurtzite structure. The Raman spectrum reveals A1(LO) and E1(LO) modes are obtained at 524 and 578 cm-1 corresponding to the oxygen defects present in ZnO-NWs. The PL spectra confirms two prominent bands at around 394 (3.14 eV) and 465 nm (2.6 eV) for the ZnO-NWs corresponds to the near-band-edge emission of ZnO-NWs. The XPS results reveal the core orbital spectra for Zn(3d), Zn(3p), Zn(3s), O(1s), Zn (2p3/2), Zn (2p1/2) and Zn(2s) are observed at ∼14.1, ∼89, ∼140, 530.3, 1021.2, 1044.4 and ∼1200 eV respectively. (author)