[en] Indium Oxide thin films have been prepared by Spray Pyrolysis using a three different molar concentration of Indium precursor. The spray process parameters like the concentration of precursor in spray solution, ethanol, air-flow rate, substrate nozzle distance and substrate temperature have been optimized for obtaining optically transparent, conducting In₂O₃ films. The material properties are reported by studying the structural, optical and photoluminescence properties of the In₂O₃ films as a function of precursor concentration. The sample prepared at 0.15M exhibited best crystal quality with body centered cubic (bcc) structure of pure In₂O₃ .The maximum transmittance for the visible spectral range exceeded 85%.The optical band gap of the film increased from 3.61eV to 3.67eV with the increase of molar concentration from 0.05 M,0.1 M and 0.15 M.The surface morphology has been studied by scanning electron microscopy. (author)