[en] An improved extraction method for analyzing inclusions in the microprobe or scanning electron microscope (SEM) was developed using a plastic extraction medium, replacing one of electroplated metal used previously. A plastic substrate simplifies correction procedures in analyzing small particles by minimizing electron and x-ray interferences between the extracted material and the extraction medium. A number of polymers were tested with respect to their stability under electron bombardment. Both unfilled polyimide and diallyl phthalate resins give a satisfactory performance under most probe and SEM conditions, although the latter requires a preliminary in situ beam fixation treatment. Epoxy-type resins are not stable under irradiation and break down structurally at all electron beam current densities