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AbstractAbstract
[en] ZnO films have been reproducibly grown using chemical deposition and radio-frequency sputtering techniques. These films are polycrystalline or amorphous, but are stable, uniform and lend themselves to material characterization by Auger and x-ray analysis techniques, and electrical measurements. SnO2 films have been reproducibly grown by chemical vapor deposition, vacuum deposition and radio-frequency sputtering techniques. These films are also polycrystalline or amorphous, and lend themselves to material characterization and measurements. By vacuum deposition techniques, Si-SnO2 heterojunctions have been grown, which exhibit good rectification properties. An original thermodynamic analysis of the growth of SnO2 by a chemical vapor deposition technique based on the reaction between SnCl4 and H2O has been developed and submitted for publication. Pd-SiO2-Si Schottky barrier diodes exhibiting excellent rectification properties have been successfully fabricated. A formalism has been established for the analysis of the behavior of these devices in the presence of H2, H2S and CO. The ZnO films grown by chemical deposition have proven to be sensitive to CO and CH4. Sputtered ZnO films are sensitive to O2 and H2. SnO2 films grown by chemical vapor deposition are not very sensitive to gases. Sputtered films, however, are very sensitive to H2 and H2S. The Pd-SiO2-Si diodes are extremely sensitive to H2, H2S and NH3, and, under certain conditions, to CO. A microprocessor data processing system has been developed incorporating gas sensors in the presence of a variety of gases and gas mixtures
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Source
Apr 1978; 52 p; Available from NTIS., PC A04/MF A01
Record Type
Report
Literature Type
Progress Report
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Reference NumberReference Number
INIS VolumeINIS Volume
INIS IssueINIS Issue