[en] We describe an adaptation of photon excited x-ray fluorescence analysis which is optimized for the analysis of small samples. A fine focus x-ray tube is used in conjunction with small diameter detector collimators in order to focus on a small sample volume with as high sensitivity as possible. Sample areas of less than 1 mm diameter can be analyzed with ppM detectability. In applications involving the analysis of human hair samples, a minimum detectable limit of 10 ppM Hg can be realized in a 1 mm long segment of a single hair in a counting time of 200 seconds. Simultaneous measurements of the sample mass can be obtained from the intensity of the incoherent scattering. An automated x-ray fluorescence analysis system using the technique for the scanning of elemental profiles in such hair samples will be described