AbstractAbstract
[en] This fact sheet explains how Anon, Inc., has developed a novel method of removing photoresist--a light-sensitive material used to produce semiconductor wafers for computers--from the computer manufacturing process at reduced cost and greater efficiency. The new technology is technically superior to existing semiconductor cleaning methods and results in reduced use of hazardous chemicals
Primary Subject
Source
29 Jan 1999; 2 p; ALSO AVAILABLE FROM OSTI AS DE00004092; NTIS; US GOVT. PRINTING OFFICE DEP; AC36-98GO10337
Record Type
Miscellaneous
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Descriptors (DEI)
Descriptors (DEC)
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