Materials characterization using ion beam analysis

Ion beam analysis (ISA) is an important tool for compositional investigations in the surface and near-surface regions of materials. It is unique among surface analytical techniques by virtue of its sensitivity towards several elements, light or otherwise, across the periodic table and non-destructive depth perception capability. It has been used extensively for elemental and stoichiometric analyses, determination of depth profiles and diffusion parameters, defect analysis and microarea elemental distributions in materials that find applications in fields ranging from nuclear industry and semiconductor technology to environmental science and archaeology